GSI Lumonics Scanning Galvo System GS5EAI01D-01REF
This is a 4-axis (X-Y-Z-Theta) Scanner head. It was a system spare for a high energy Laser Wafer Dicing/Marking system. This is model GS5EAI01D-01REF. There are 9-Fold mirrors that direct the incoming beam to each mirror.